====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 2.925E22 atoms/cm3 = 7.008 g/cm3
  Layer # 1- Nd = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   219.1E+02 A   Straggling =   552.4E+01 A
 Ion Lateral Range =   565.6E+01 A   Straggling =   698.0E+01 A
 Ion Radial  Range =   884.4E+01 A   Straggling =   423.8E+01 A
====================================================================
 Range Skewne- = -000.7542  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.8236  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
400010.E-03  0.0000E+00  0.0000E+00
800010.E-03  0.0000E+00  0.0000E+00
120001.E-02  2.4975E+02  0.0000E+00
160001.E-02  0.0000E+00  0.0000E+00
200001.E-02  0.0000E+00  0.0000E+00
240001.E-02  0.0000E+00  0.0000E+00
280001.E-02  4.9950E+02  0.0000E+00
320001.E-02  2.4975E+02  0.0000E+00
360001.E-02  4.9950E+02  0.0000E+00
400001.E-02  9.9900E+02  0.0000E+00
440001.E-02  2.4975E+02  0.0000E+00
480001.E-02  2.4975E+02  0.0000E+00
520001.E-02  4.9950E+02  0.0000E+00
560001.E-02  2.4975E+02  0.0000E+00
600001.E-02  2.4975E+02  0.0000E+00
640001.E-02  2.4975E+02  0.0000E+00
680001.E-02  4.9950E+02  0.0000E+00
720001.E-02  0.0000E+00  0.0000E+00
760001.E-02  0.0000E+00  0.0000E+00
800001.E-02  2.4975E+02  0.0000E+00
840001.E-02  4.9950E+02  0.0000E+00
880001.E-02  4.9950E+02  0.0000E+00
920001.E-02  4.9950E+02  0.0000E+00
960001.E-02  9.9900E+02  0.0000E+00
100000.E-01  4.9950E+02  0.0000E+00
104000.E-01  2.4975E+02  0.0000E+00
108000.E-01  4.9950E+02  0.0000E+00
112000.E-01  1.2488E+03  0.0000E+00
116000.E-01  1.9980E+03  0.0000E+00
120000.E-01  1.9980E+03  0.0000E+00
124000.E-01  7.4925E+02  0.0000E+00
128000.E-01  1.4985E+03  0.0000E+00
132000.E-01  1.2488E+03  0.0000E+00
136000.E-01  1.7483E+03  0.0000E+00
140000.E-01  1.7483E+03  0.0000E+00
144000.E-01  4.2458E+03  0.0000E+00
148000.E-01  1.7483E+03  0.0000E+00
152000.E-01  2.2478E+03  0.0000E+00
156000.E-01  9.9900E+02  0.0000E+00
160000.E-01  2.4975E+03  0.0000E+00
164000.E-01  2.7473E+03  0.0000E+00
168000.E-01  2.4975E+03  0.0000E+00
172000.E-01  5.7443E+03  0.0000E+00
176000.E-01  4.2458E+03  0.0000E+00
180000.E-01  3.7463E+03  0.0000E+00
184000.E-01  5.2448E+03  0.0000E+00
188000.E-01  5.9940E+03  0.0000E+00
192000.E-01  4.9950E+03  0.0000E+00
196000.E-01  6.7433E+03  0.0000E+00
200000.E-01  5.9940E+03  0.0000E+00
204000.E-01  6.7433E+03  0.0000E+00
208000.E-01  5.9940E+03  0.0000E+00
212000.E-01  8.4915E+03  0.0000E+00
216000.E-01  6.2438E+03  0.0000E+00
220000.E-01  8.9910E+03  0.0000E+00
224000.E-01  7.7423E+03  0.0000E+00
228000.E-01  6.2438E+03  0.0000E+00
232000.E-01  8.4915E+03  0.0000E+00
236000.E-01  6.7433E+03  0.0000E+00
240000.E-01  6.4935E+03  0.0000E+00
244000.E-01  7.2428E+03  0.0000E+00
248000.E-01  9.2408E+03  0.0000E+00
252000.E-01  5.9940E+03  0.0000E+00
256000.E-01  8.2418E+03  0.0000E+00
260000.E-01  7.2428E+03  0.0000E+00
264000.E-01  5.7443E+03  0.0000E+00
268000.E-01  6.7433E+03  0.0000E+00
272000.E-01  5.9940E+03  0.0000E+00
276000.E-01  5.4945E+03  0.0000E+00
280000.E-01  5.9940E+03  0.0000E+00
284000.E-01  3.7463E+03  0.0000E+00
288000.E-01  4.9950E+03  0.0000E+00
292000.E-01  3.7463E+03  0.0000E+00
296000.E-01  4.2458E+03  0.0000E+00
300000.E-01  1.7483E+03  0.0000E+00
304000.E-01  2.4975E+03  0.0000E+00
308000.E-01  1.4985E+03  0.0000E+00
312000.E-01  2.2478E+03  0.0000E+00
316000.E-01  9.9900E+02  0.0000E+00
320000.E-01  9.9900E+02  0.0000E+00
324000.E-01  9.9900E+02  0.0000E+00
328000.E-01  2.4975E+02  0.0000E+00
332000.E-01  1.2488E+03  0.0000E+00
336000.E-01  0.0000E+00  0.0000E+00
340000.E-01  0.0000E+00  0.0000E+00
344000.E-01  0.0000E+00  0.0000E+00
348000.E-01  0.0000E+00  0.0000E+00
352000.E-01  0.0000E+00  0.0000E+00
356000.E-01  0.0000E+00  0.0000E+00
360000.E-01  0.0000E+00  0.0000E+00
364000.E-01  0.0000E+00  0.0000E+00
368000.E-01  0.0000E+00  0.0000E+00
372000.E-01  0.0000E+00  0.0000E+00
376000.E-01  0.0000E+00  0.0000E+00
380000.E-01  0.0000E+00  0.0000E+00
384000.E-01  0.0000E+00  0.0000E+00
388000.E-01  0.0000E+00  0.0000E+00
392000.E-01  0.0000E+00  0.0000E+00
396000.E-01  0.0000E+00  0.0000E+00
400000.E-01  0.0000E+00  0.0000E+00
